JPS6417792U - - Google Patents
Info
- Publication number
- JPS6417792U JPS6417792U JP11307487U JP11307487U JPS6417792U JP S6417792 U JPS6417792 U JP S6417792U JP 11307487 U JP11307487 U JP 11307487U JP 11307487 U JP11307487 U JP 11307487U JP S6417792 U JPS6417792 U JP S6417792U
- Authority
- JP
- Japan
- Prior art keywords
- holding device
- utility
- model registration
- electrostatic holding
- thermal conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 6
- 239000012777 electrically insulating material Substances 0.000 claims 3
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
- 229910052582 BN Inorganic materials 0.000 claims 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical group N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 229920001971 elastomer Polymers 0.000 claims 1
- 239000000806 elastomer Substances 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 230000005686 electrostatic field Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000003507 refrigerant Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11307487U JPS6417792U (en]) | 1987-07-23 | 1987-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11307487U JPS6417792U (en]) | 1987-07-23 | 1987-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6417792U true JPS6417792U (en]) | 1989-01-30 |
Family
ID=31352591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11307487U Pending JPS6417792U (en]) | 1987-07-23 | 1987-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6417792U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5242975B2 (en]) * | 1972-09-29 | 1977-10-27 | ||
| JPS622632A (ja) * | 1985-06-28 | 1987-01-08 | Fujitsu Ltd | 静電吸着装置 |
-
1987
- 1987-07-23 JP JP11307487U patent/JPS6417792U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5242975B2 (en]) * | 1972-09-29 | 1977-10-27 | ||
| JPS622632A (ja) * | 1985-06-28 | 1987-01-08 | Fujitsu Ltd | 静電吸着装置 |
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